×

You are using an outdated browser Internet Explorer. It does not support some functions of the site.

Recommend that you install one of the following browsers: Firefox, Opera or Chrome.

Contacts:

+7 961 270-60-01
ivdon3@bk.ru

Electron beam surface modification of multi-component glasses for microsystems

Abstract

Electron beam surface modification of multi-component glasses for microsystems

Polyakov V.V., Avdeev S.P.

Incoming article date: 16.03.2018

The questions of desorption of the elemental composition of glass during processing with an electron beam is discussed. Sample silicate glasses prepared by standard technology were studied after polishing by electron beam processing (EBP). Calculated estimates showed that the depth of the surface depletion layer of weakly alkaline elements reaches 20-50 nm. Herewith the temperature front reaches the machining depth of 50 µm.

Keywords: electron-beam, glass, diffusion, desorption, microsystems