Computer-aided Diagnostic System of Semiconductor Structures
Abstract
Computer-aided Diagnostic System of Semiconductor Structures
Incoming article date: 16.08.2013Computer-aided diagnostic system of semiconductor structures for the tested structures volt-ampere and voltage-capacitance characteristics measuring at different temperatures in wide ranging bias voltage was made in this work. Computer-aided diagnostic system of semiconductor structures allows to define parameters of deep-lying levels, profiles of alloying impurities distribution, charge carriers life span, surface states energy spectrum density with high reliability and efficiency and can be used for processing and optimization of technological modes for solid-state electronics structures generation.
Keywords: diagnostics, dynamic spectroscopy of deep-lying levels , spectrum, deep-lying levels, surface states, profile of impurity distribution