Types of error of micrimechanics sensors and methods of their analysis
Abstract
Types of error of micrimechanics sensors and methods of their analysis
Incoming article date: 18.02.2019The aim of the article is to analyze types of error and exicting methods of analysis for definition random errors of micromechanics gyroscope and sensors, generally. A comparison of different methods of analysis for determining a random errors is conducted: autocorrelation, power spectral density analysis and Allan variation analysis. This material will contribution to making tests for definition random errors of gyroscopic sensor TG-8A designing in Laboratory of Microdevices.
Keywords: mems sensors; mems gyroscope; systematic and random error; noise analysis; autocorrelation method; Allan variation