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  • Types of error of micrimechanics sensors and methods of their analysis

    The aim of the article is to analyze types of error and exicting methods of analysis for definition random errors of micromechanics gyroscope and sensors, generally. A comparison of different methods of analysis for determining a random errors is conducted: autocorrelation, power spectral density analysis and Allan variation analysis. This material will contribution to making tests for definition random errors of gyroscopic sensor TG-8A designing in Laboratory of Microdevices.

    Keywords: mems sensors; mems gyroscope; systematic and random error; noise analysis; autocorrelation method; Allan variation