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Model of micromechanical mirrors mobile elements balance with internal suspension

Abstract

Model of micromechanical mirrors mobile elements balance with internal suspension

I.E. Lysenko

Incoming article date: 07.05.2013

The model of micromechanical mirrors mobile elements balance is developed. The received results of modelling of a micromechanical mirror are considered. 

Keywords: microsystm technology, element base, model, modeling, mirror