Интегральные сенсоры угловых скоростей и линейных ускорений типа на основе углеродных нанотрубок

И.Е. Лысенко; А.В.  Лысенко

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Integrated gyroscope-accelerometers lr-type on the basis of carbon nanotube

Abstract

Integrated gyroscope-accelerometers lr-type on the basis of carbon nanotube

Lysenko I.E., Lysenko A.V.

The integrated sensor LR-type on the basis of carbon nanotube is described. Are offered a method of processing of the sensor signals. Results of modelling are represented.

Keywords: Еlement base, microelectromechanical system, design, sensor, gyroscope, accelerometer.